Novel Design and Fabrication of High Sensitivity MEMS Capacitive Sensor Array for Fingerprint Imaging
نویسندگان
چکیده
منابع مشابه
Design of Novel High Sensitive MEMS Capacitive Fingerprint Sensor
In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...
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ژورنال
عنوان ژورنال: Advanced Materials Research
سال: 2009
ISSN: 1662-8985
DOI: 10.4028/www.scientific.net/amr.74.239